Silicon thermal oxidation calculator
This calculator uses the Deal–Grove or Massoud models for thermal oxidation of silicon. Choose the oxidation process parameters (wet/dry, oxidation temperature, Si crystal orientation, etc.), and the calculator will return either the oxide thickness given oxidation time or the oxidation time given thickness, with a plot of results.
VASE to Filmetrics
Convert files containing optical constants obtained using variable angle spectroscopic ellipsometry (VASE) into a format compatible with the Filmetrics F50-UV tool.
Structure zone model calculator
Use this interactive plot to determine the microstructure of sputtered metal films as predicted by the Thornton structure zone model, given a material, substrate temperature, and Ar pressure in the sputtering chamber.