The nanoFAB has created some tools to assist with data conversions and calculations. Usage instructions can be found on each page.
Silicon thermal oxidation calculator
This calculator uses the Deal–Grove or Massoud models for thermal oxidation of silicon. Choose the oxidation process parameters (wet/dry, oxidation temperature, Si crystal orientation, etc.), and the calculator will return either the oxide thickness given oxidation time or the oxidation time given thickness, with a plot of results.