The following is a list of standard recipes, techniques, tips and other various application notes that have been developed in the nanoFAB over time. The information here may serve as a useful starting point for further process development.
|Title||Applicable Equipment||Process Area|
|Aluminum Etching||Wet Deck||Wet-Etch|
The following is a list of standard operating procedures used in the nanoFAB. Physical copies of these procedures are also available next to each piece of equipment.
|ABM Mask Aligners||Lithography||W1-062|