Log in
nanoFAB Confluence
Spaces
People
Hit enter to search
Help
Online Help
Keyboard Shortcuts
Feed Builder
What’s new
Available Gadgets
About Confluence
Log in
Equipment
Space shortcuts
Equipment List
Operating Procedures
Hazard Assessments
Page tree
Browse pages
Configure
Space tools
View Page
A
t
tachments (0)
Page History
Page Information
View in Hierarchy
View Source
Export to PDF
Export to Word
Pages
…
nanoFAB Equipment
Equipment List
KJLC 150LX Atomic Layer Deposition
Page Information
Title:
KJLC 150LX Atomic Layer Deposition
Author:
Michael Hume
Mar 11, 2021
Last Changed by:
Aaron Hryciw
Aug 17, 2023
Tiny Link:
(useful for email)
https://confluence.nanofab.ualberta.ca/x/_Y58Ag
Export As:
Word
·
PDF
Incoming Links
Special Projects (1)
Page:
KJLC ALD 150LX Installation
Equipment (3)
Page:
KJLC 150LX ALD Hazard Assessment
Page:
KJLC 150LX ALD SOP & HA Listing
Page:
KJLC 150LX ALD SOP
Hierarchy
Parent Page
Page:
Equipment List
Children (2)
Page:
KJLC 150LX ALD SOP & HA Listing
Page:
KJLC ALD 150LX process information
Labels
Global Labels (5)
equipment
requires-update
kjlc-150lx-ald
$labeltext
deposition
Page Permissions
Page restrictions:
Only users in group
nf-staff
can
edit
this page.
(set by
Michael Hume
at Mar 11, 2021 17:45)
Only
ahryciw
can
edit
this page.
(set by
Scott Munro
at Nov 08, 2022 16:24)
Only
hume
can
edit
this page.
(set by
Michael Hume
at Mar 11, 2021 17:45)
Only
smunro
can
edit
this page.
(set by
Scott Munro
at Nov 08, 2022 16:24)
Recent Changes
Time
Editor
Aug 17, 2023 14:23
Aaron Hryciw
View Changes
Jan 25, 2023 13:31
Devin Fortier
View Changes
Nov 14, 2022 10:22
Aaron Hryciw
View Changes
Nov 09, 2022 22:09
Aaron Hryciw
View Changes
Nov 09, 2022 22:09
Aaron Hryciw
View Page History
Outgoing Links
External Links (7)
mailto:joeyk@lesker.com
https://www.lesker.com/newweb/vacuum_systems/deposition_sys…
mailto:noelo@lesker.com
https://www.lesker.com/
mailto:NAservice@lesker.com
https://confluence.nanofab.ualberta.ca/label/kjlc-150lx-ald
mailto:brucer@lesker.com
Equipment (5)
Page:
2a. Atomic Layer Deposition - Purchase
Page:
KJLC ALD 150LX process information
Page:
KJLC 150LX ALD Hazard Assessment
Page:
2021-08 KJLC 150LX ALD Installation
Page:
KJLC 150LX ALD SOP
Overview
Content Tools
{"serverDuration": 169, "requestCorrelationId": "9bd18442536fea58"}