Title: Trion Phantom RIE  
Author: Michael Hume Sept 16, 2020
Last Changed by: Aaron Hryciw Dec 19, 2022
Tiny Link: (useful for email) https://confluence.nanofab.ualberta.ca/x/hYX6AQ
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Incoming Links
Equipment (4)
    Page: Trion RIE SOP & HA Listing
    Page: Trion RIE etch information
    Page: Trion RIE Hazard Assessment - HA
    Page: Trion RIE SOP
Special Projects (1)
    Page: KJLC ALD 150LX Installation
Hierarchy
Parent Page
    Page: Equipment List
Children (3)
    Page: Trion RIE Blog Posts
    Page: Trion RIE etch information
    Page: Trion RIE SOP & HA Listing
Labels
Global Labels (5)
Recent Changes
Time Editor  
Dec 19, 2022 09:55 Aaron Hryciw View Changes
May 17, 2021 11:09 Aaron Hryciw View Changes
Mar 25, 2021 15:09 Scott Munro View Changes
Jan 19, 2021 09:12 Aaron Hryciw View Changes
Jan 19, 2021 09:08 Aaron Hryciw  
Outgoing Links
External Links (5)
    mailto:service@triontech.com
    https://triontech.com/etch-platform/phantom-rie/
    mailto:susan@triontech.com
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://triontech.com/
Equipment (3)     Page: Trion RIE Hazard Assessment - HA
    Page: Trion RIE etch information
    Page: Trion RIE SOP
nanoFAB Knowledge Base (3)     Page: Tetraflouromethane Halocarbon 14
    Page: Oxygen
    Page: Sulfur Hexafluoride