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nanoFAB Equipment
Equipment List
Electron-Beam Evaporation System #2 (PVD-75)
Page Information
Title:
Electron-Beam Evaporation System #2 (PVD-75)
Author:
Glenn Elaschuk
Apr 28, 2020
Last Changed by:
Aaron Hryciw
May 29, 2023
Tiny Link:
(useful for email)
https://confluence.nanofab.ualberta.ca/x/uwyIAQ
Export As:
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Incoming Links
Equipment (7)
Page:
How-To Request an Alternative Approved PVD-75 Material
Page:
PVD-75 SOP & HA Listing
Page:
Electron-Beam Evaporation System #2 (PVD-75) HA
Page:
PVD-75 Tooling Factors
Page:
Known allowed and prohibited materials in nanoFAB PVD tools
Page:
QCM Material Parameters
Page:
PVD-75 Evaporation System SOP
nanoFAB Knowledge Base (1)
Page:
Sign out precious metals for deposition tools
Hierarchy
Parent Page
Page:
Equipment List
Children (4)
Page:
How-To Request an Alternative Approved PVD-75 Material
Page:
PVD-75 Meeting notes
Page:
PVD-75 SOP & HA Listing
Page:
PVD-75 Tooling Factors
Labels
Global Labels (3)
equipment
pvd-75
deposition
Recent Changes
Time
Editor
May 29, 2023 12:12
Aaron Hryciw
View Changes
Mar 22, 2023 13:19
Timothy Harrison
View Changes
Mar 15, 2023 16:45
Timothy Harrison
View Changes
Mar 15, 2023 16:44
Timothy Harrison
View Changes
Nov 01, 2022 09:37
Aaron Hryciw
View Page History
Outgoing Links
External Links (8)
https://confluence.nanofab.ualberta.ca/label/pvd-75
https://www.lesker.com/contactus/
mailto:joeyk@lesker.com
https://drive.google.com/drive/u/0/folders/13P0xkAhO1Y8SEZP…
mailto:NAservice@lesker.com
https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
https://www.lesker.com/newweb/vacuum_systems/deposition_sys…
https://www.lesker.com/
Equipment (3)
Page:
QCM Material Parameters
Page:
How-To Request an Alternative Approved PVD-75 Material
Page:
PVD-75 Evaporation System SOP
Overview
Content Tools
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