Title: Plasma-Therm Versaline PECVD  
Author: Devin Fortier Mar 20, 2020
Last Changed by: Aaron Hryciw Mar 01, 2023
Tiny Link: (useful for email) https://confluence.nanofab.ualberta.ca/x/ZQaIAQ
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Incoming Links
Equipment (3)
    Page: Plasma-Therm Versaline PECVD HA
    Page: Plasma-Therm PECVD SOP & HA Listing
    Page: Plasma-Therm Versaline PECVD SOP
Hierarchy
Parent Page
    Page: Equipment List
Children (3)
    Page: Plasma-Therm PECVD SOP & HA Listing
    Page: Plasma-Therm PECVD process information
    Page: 2023-06-13 PlasmaTherm Equipment Issues Meeting notes
Labels
Global Labels (5)
Recent Changes
Time Editor  
Mar 01, 2023 09:24 Aaron Hryciw View Changes
Nov 07, 2022 11:00 Aaron Hryciw View Changes
Sept 01, 2022 09:19 Devin Fortier View Changes
Aug 22, 2022 15:09 Timothy Harrison View Changes
Aug 22, 2022 14:56 Timothy Harrison  
Outgoing Links
External Links (5)
    mailto:armin.baur@plasmatherm.com
    https://confluence.nanofab.ualberta.ca/label/plasmatherm-ve…
    mailto:scott.harding@plasmatherm.com
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    www.plasma-therm.com/versaline.html
Equipment (4)     Page: Plasma-Therm Versaline PECVD
    Page: Plasma-Therm Versaline PECVD SOP
    Page: Plasma-Therm PECVD process information
    Page: Plasma-Therm Versaline PECVD HA