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nanoFAB Equipment
Hazard Assessments
Page Information
Title:
Hazard Assessments
Author:
Davor Karacic
Mar 19, 2020
Last Changed by:
Aaron Hryciw
Jan 04, 2023
Tiny Link:
(useful for email)
https://confluence.nanofab.ualberta.ca/x/CwaIAQ
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Equipment (71)
Page:
Leica EM ACE600 SOP & HA Listing
Page:
Wet Deck 1B SOP & HA Listing
Page:
Brewer 1300X SOP & HA Listing
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VASE VB-400 Ellipsometer SOP & HA Listing
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Zeiss Sigma FESEM SOP & HA Listing
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Renishaw inVia Raman Microscope SOP & HA Listing
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Leica RES102 SOP & HA Listing
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Angstrom Thermal Evaporator SOP & HA Listing
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YES HMDS Oven SOP & HA Listing
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RAITH150 Two SOP & HA Listing
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Servo Precision Drill Press SOP & HA Listing
Page:
KLA ASIQ - Cleanroom SOP & HA Listing
Page:
Fluxim Paios Spectrometer SOP & HA Listing
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KJLC CMS-18 (Floyd) SOP & HA Listing
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Hitachi S-4800 SOP & HA Listing
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Zeiss Xradia XRM SOP & HA Listing
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JEOL JEM ARM-200 TEM SOP & HA Listing
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PHI 5000 VersaProbe XPS SOP & HA Listing
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SUSS CBL6 Bonder SOP & HA Listing
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Tystar Furnaces SOP & HA Listing
Page:
SUSS MA6BA6 Mask Aligner SOP & HA Listing
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Plasma-Therm PECVD SOP & HA Listing
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Rigaku XRD Ultima IV SOP & HA Listing
Page:
ABM Mask Aligner(Grover) SOP & HA Listing
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Filmetrics F50-UV SOP & HA Listing
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Wet Deck 2A SOP & HA Listing
Page:
Sitek SemiTool 840-S SOP & HA Listing
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Zeiss EVO MA10 SOP & HA Listing
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KJLC 150LX ALD SOP & HA Listing
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Disco 3240 Dicing Saw SOP & HA Listing
Page:
KJLC CMS-18 (Bob) SOP & HA Listing
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Trion PECVD SOP & HA Listing
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Oxford NGP80 RIE SOP & HA Listing
Page:
Leica INM-100 #1 SOP & HA Listing
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Autosorb IQ SOP & HA Listing
Page:
Toho FLX-2320-S SOP & HA Listing
Page:
IBSS Contamination Control System SOP & HA Listing
Page:
Alcatel AMS110 SOP & HA Listing
Page:
JA Woollam M-2000 Ellipsometer SOP & HA Listing
Page:
PVD-75 SOP & HA Listing
Page:
Litho Wet Deck #2 SOP & HA Listing
Page:
Oxford Cobra ICPRIE SOP & HA Listing
Page:
Dymax Bluewave 200 SOP & HA Listing
Page:
Wet Deck 1C SOP & HA Listing
Page:
Nanoscribe Professional GT 2PP SOP & HA Listing
Page:
Zeiss Orion HeION SOP & HA Listing
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Parylene Deposition SOP & HA Listing
Page:
Allwin AW610 RTA SOP & HA Listing
Page:
Critical Point Dryer SOP & HA Listing
Page:
Nikon Eclipse L200N SOP & HA Listing
Page:
XRF Elemental Analyzer SOP & HA Listing
Page:
Gomez SOP & HA Listing
Page:
Brewer 200X SOP & HA Listing
Page:
memsstar VHF Etcher SOP & HA Listing
Page:
GLAD - Achilles SOP & HA Listing
Page:
TPT HB16 Wire Bonder SOP & HA Listing
Page:
Sputtering System #4 Moe SOP & HA Listing
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Wet Deck 2C SOP & HA Listing
Page:
KLA ASIQ - Characterization SOP & HA Listing
Page:
Bruker XRD D8 SOP & HA Listing
Page:
Litho Wet Deck #1 SOP & HA Listing
Page:
Wet Deck 2B SOP & HA Listing
Page:
KJLC CMS-18 (Doug) SOP & HA Listing
Page:
Trion RIE SOP & HA Listing
Page:
Wet Deck 1A SOP & HA Listing
Page:
Disco 3241 Dicing Saw SOP & HA Listing
Page:
Heidelberg MLA150 SOP & HA Listing
Page:
Hydra DualBeam SEM SOP & HA Listing
Page:
Oxford Estrelas ICPRIE SOP & HA Listing
Page:
Sitek SemiTool 870-S SOP & HA Listing
Page:
ABM UV Flood Exposure SOP & HA Listing
Hierarchy
Parent Page
Home page:
nanoFAB Equipment
Children (103)
Page:
10k Litho Fumehood - HA
Page:
ABM Mask Aligner Bert HA
Page:
ABM Mask Aligner Grover HA
Page:
ABM UV Flood Exposure System - Sunny - HA
Page:
Alcatel AMS110 ICPRIE Hazard Assessment - HA
Page:
Allwin AW610 RTA HA
Page:
Alpha-Step IQ - Cleanroom
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AML Aligner and Wafer Bonder HA
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Atomic Force Microscope (Dimension Edge) HA
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Autosorb iQ HA
Show all...
Page:
Autosorb Quantachrome 1MP HA
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Branson 3000 Barrel Etcher - HA
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Brewer Spinner and Hotplate HA
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Bruker D8D plus XRD-SAXS HA
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Bruker XRD HA
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Characterization Lab ECERF W1-040 General HA
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Cold Plate (Stir-Kool SK-12D) HA
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Contact Angle and InterFacial Tension HA
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Critical Point Dryer Hazard Assessement - HA
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Denton Gold Sputter Unit (for SEM)-HA
Page:
Disco Dicing Saw 3240 HA
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Disco Dicing Saw 3241 HA
Page:
Discovery TGA HA
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Dymax BlueWave 200 HA
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Electron-Beam Evaporation System #1 (Gomez) HA
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Electron-Beam Evaporation System #2 (PVD-75) HA
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Eppendorf Centrifuge 5804R HA
Page:
EVO SEM HA
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Filmetrics F50 UV Hazard Assessment
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Filmetrics Thickness Monitor (F10-VC) HA
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Fluxim Paios Spectrometer HA
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Four-Point Probe (Pro4 4000) HA
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Freeze Dryer HA
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GLAD System (Achilles) HA
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Heidelberg MLA150 HA
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HF/BOE, titanium, glass, and Borofloat etching HA
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Hitachi S-4800 FESEM HA
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IBSS Contamination Control System HA
Page:
Inspection microscopes (Nikon L200N and LV150, Zeiss Axiolab) HA
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J.A. Woollam M2000V Ellipsometer HA
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J.A. Woollam VASE Ellipsometer HA
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JEOL JEM-ARM200CF (HA)
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Keithley 4200 SCS Analyzer -HA
Page:
KJLC 150LX ALD Hazard Assessment
Page:
KLA - Alpha-Step IQ Profilometer - Characterization HA
Page:
KOH and TMAH Etching Hazard Assessment - HA
Page:
Leica EM ACE600 HA
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Leica RES102 Ion Mill HA
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Liquid Nitrogen Filling from 230L Tank HA
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memsstar Vapour HF Etching System Hazard Assessment - HA
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Metal etching HA
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Minibrute Top/Middle Furnace HA
Page:
Nanometrics Hall Measurement HA
Page:
Nanoscribe Photonic Professional GT HA
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nGauge AFM HA
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Nitric Acid Etching - HA
Page:
Olympus LEXT OLS3100 Confocal Laser Scanning HA
Page:
Organics Evaporator (Angstrom Covap III) HA
Page:
Oxford Cobra ICPRIE Hazard Assessment - HA
Page:
Oxford Estrelas ICPRIE Hazard Assessment - HA
Page:
Oxford NGP80 RIE Hazard Assessment - HA
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Parylene Depostion System HA
Page:
PDMS Process Area Hazard Assessment - HA
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Perkin-Elmer NIR-UV Spectrophotometer HA
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Photoresist development - Alkaline developers HA
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Photoresist development - Solvent based developers HA
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Photoresist development - TMAH based developers HA
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Piranha HA
Page:
Plasma-Therm Versaline PECVD HA
Page:
PVA TePla Ion 10Q - HA
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RAITH150 Two EBL System HA
Page:
RAITH Voyager EBL System HA
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Renishaw inVia Raman Microscope HA
Page:
Rigaku XRD HA
Page:
Servo Precision Drill Press HA
Page:
Signatone Four-Point Probe (Cleanroom) HA
Page:
Sitek - Semitool 870-S Spin Rinse Dryer
Page:
Sono-Tek ExactaCoat Spray Coater HA
Page:
Spectrophotometer UV_VIS (Hitachi U-3900H) HA
Page:
Spin-bake stations #1 and #2 - HA
Page:
Sputtering System #1 (Bob) HA
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Sputtering System #2 (Doug) HA
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Sputtering System #3 (Floyd) HA
Page:
Sputtering System #4 (Moe) HA
Page:
Suss CB6L Bonder Hazard Assessment - HA
Page:
SUSS MA/BA6 HA
Page:
Tescan Vega3 SEM HA
Page:
ThermoFisher Helios Hydra PFIB/SEM HA
Page:
Toho FLX-2320-S HA
Page:
TPT HB16 Wire bonder HA
Page:
Trion PECVD HA
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Trion RIE Hazard Assessment - HA
Page:
Tystar Tubes 2, 3, and 4 (LPCVD) HA
Page:
Tystar Tubes 5, 6, and 7 HA
Page:
UV - Ozone (Bonder) Hazard Assessment - HA
Page:
Wet decks - General use HA
Page:
Xenon Difluoride (XeF2) Etch System Hazard Assessment - HA
Page:
Yamato Oven - HA
Page:
YES - YES3TA HMDS Oven - HA
Page:
Zeiss Helium Ion Microscope with Ga-FIB HA
Page:
Zeiss Sigma FeSEM HA
Page:
Zeiss Versa Xradia 620 HA
Page:
Zygo Optical Profilometer HA
Hide...
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hazard-assessment
Recent Changes
Time
Editor
Jan 04, 2023 16:05
Aaron Hryciw
View Changes
Jan 27, 2021 09:13
Gustavo de Oliveira Luiz
View Changes
Jan 27, 2021 09:12
Gustavo de Oliveira Luiz
View Changes
Sept 24, 2020 11:41
Michael Hume
View Changes
Sept 14, 2020 16:57
Michael Hume
View Page History
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