Title: Heidelberg MLA150 Maskless Aligner  
Author: Michael Hume Feb 11, 2020
Last Changed by: Aaron Hryciw May 24, 2022
Tiny Link: (useful for email) https://confluence.nanofab.ualberta.ca/x/ZgCIAQ
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Incoming Links
Equipment (4)
    Page: Heidelberg MLA150 - Design guidelines
    Page: Heidelberg MLA150 HA
    Page: Heidelberg MLA150 SOP
    Page: Heidelberg MLA150 SOP & HA Listing
nanoFAB Knowledge Base (1)
    Page: Microfluidics – PDMS mold fabrication
Hierarchy
Parent Page
    Page: Equipment List
Children (3)
    Page: Heidelberg MLA150 - Design guidelines
    Page: Heidelberg MLA150 SOP & HA Listing
    Page: Heidelberg MLA150 - Standard recipes
Labels
Global Labels (5)
Recent Changes
Time Editor  
May 24, 2022 13:15 Aaron Hryciw View Changes
May 04, 2022 11:31 Aaron Hryciw View Changes
Feb 04, 2022 11:32 Aaron Hryciw View Changes
Feb 03, 2022 13:17 Gustavo de Oliveira Luiz View Changes
Feb 03, 2022 13:02 Gustavo de Oliveira Luiz  
Outgoing Links
External Links (10)
    https://www.spectraresearch.com/
    https://confluence.nanofab.ualberta.ca/label/EQ/heidelberg-…
    mailto:mla150@himt.us
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://heidelberg-instruments.com/
    https://heidelberg-instruments.com/en/products/mla150.html
    mailto:shaneg@aca.ca
    mailto:service@himt.us
    mailto:lisam@aca.ca
    mailto:christian.bach@himt.us
Equipment (4)     Page: Heidelberg MLA150 HA
    Page: 1b. Maskless Lithography - Purchase
    Page: Heidelberg MLA150 SOP
    Page: 2020-01 MLA150 Maskless Aligner - Installation