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ProductZED-N50
ManufacturerZEON Corporation
Composition100% pentyl acetate; liquid
Synonymsn-amyl acetate
Typical UsesDeveloper for ZEP-520A electron-beam lithography resist
Hazards

Nfpa704
HealthNum1
FlamNum3

Whmis picts
Flamtrue
Healthtrue
Excltrue

Hazcat
HazClassFlammable liquids
HazCat3
, 
Hazcat
HazClassSerious eye damage/eye irritation
SubCatB
HazCat2
, 
Hazcat
HazClassSpecific target organ toxicity – single exposure
HazCat3
 (narcotic effects),  
Hazcat
HazClassSpecific target organ toxicity – single exposure
HazCat3
 (respiratory tract irritation), 
Hazcat
HazClassSpecific target organ toxicity – repeated exposure
HazCat1
 (nervous system)

StorageCabinet 6 (flammables cabinet in Wet Aisle 2)
DisposalLiquid:  solvent waste bottles in Litho Wet Deck #1/#2 or Wet Deck 1A/1B.  Solid:  organic waste pail or organic sharp waste pail under Fumehood Aisle 1.
CommentsUse in Litho Wet Deck #1/#2 for room-temperature development, or Cold Plate (Stir-Kool SK-12D) for cold development.  Must be poured in Litho Wet Deck #1/#2 or Wet Deck 1A/1B.
Status

Status
titleStocked
  




Warning
titleCheck First

Please contact a nanoFAB staff member for uses not listed above.


Embedded Google Drive File
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fullwidthtrue
height600