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Page properties
idsds


ProductHEXAMETHYLDISILAZANE
ManufacturerIntegrated Micro Materials
Composition1,1,1,3,3,3-Hexamethyldisilazane
SynonymsHMDS
Typical UsesAdhesion promoter in photolithography
Hazards

Nfpa704
InstNum1
HealthNum3
FlamNum3
 
Whmis picts
Flamtrue
Corrtrue
Toxtrue

StorageP1-004
DisposalUsed in vapour form under vacuum in the YES YES3TA HMDS Oven. Pump exhausts to general building exhaust.
CommentsNo application outside the YES YES3TA HMDS Oven
Status

Status
titleStocked
  




Warning
titleCheck First

Please contact a nanoFAB staff member for uses not listed above.


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height600