nanoFAB Knowledge Base

Space shortcuts

Page tree

Versions Compared

Old Version 8

changes.mady.by.user Davor Karacic

Saved on

compared with

New Version 9

changes.mady.by.user Davor Karacic

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page properties
idsds


ProductOrganic Polymer Solution / 950 PMMA Series Resists in Anisole
ManufacturerMicroChem Corporation
Composition1–15% poly(methylmethacrylate), 85–99% anisole; liquid
SynonymsPMMA, PMMA 950
Typical Uses

Electron-beam lithography resist

Hazards

Nfpa704
HealthNum1
FlamNum2

Whmis picts
Flamtrue
Toxtrue

Hazcat
HazClassSerious eye damage/eye irritation
SubCatB
HazCat2
, 
Hazcat
HazClassFlammable liquids
HazCat3
, 
Hazcat
HazClassSkin corrosion/irritation
HazCat3
, Acute toxicity (inhalation – gas/vapour) 
Hazcat
HazClass[none]
HazCat3
, 
Hazcat
HazClassSpecific target organ toxicity – single exposure
HazCat3
, Aquatic hazards / aquatic environmental toxicity
Hazcat
HazClass[none]
HazCat3

StorageCabinet 6 (flammables cabinet in Wet Aisle 2); Cabinet 11 (flammables cabinet in Wet Aisle 1)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
Status

Status
titleStocked
  




Warning
titleCheck First

Please contact a nanoFAB staff member for uses not listed above.


Embedded Google Drive File
urlhttps://drive.google.com/file/d/0B5USr1fI1bMeaGVIQWhkLXZJcms1svMWACb8Bq-Z4Y_cwvnC4YRySVdWMLKa/view?usp=sharing&resourcekey=0-XRLays8es5jS1FnpCgc76w
fullwidthtrue
height600