nanoFAB Knowledge Base

Space shortcuts

Page tree

Versions Compared

Old Version 6

changes.mady.by.user Davor Karacic

Saved on

compared with

New Version 7

changes.mady.by.user Aaron Hryciw

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page properties
idsds


ProductAZ P4260 P4620 photoresist
ManufacturerAZ Electronics Materials USA Corp.
Composition60–65% 1-Methoxy-2-propanol acetate, 1–5% Diazonaphthoquinonesulfonic ester, 30–35% Cresol novolak resin; liquid
Synonyms
Typical UsesThick, positive-tone photoresist for broadband and g/h/i-line exposure
Hazards

Nfpa704
HealthNum2
FlamNum2
 
Whmis picts
Flamtrue
Excltrue

Hazcat
HazClassSerious eye damage/eye irritation
SubCatA
HazCat2
,
Hazcat
HazClassFlammable liquids
HazCat3
,
Hazcat
HazClassSpecific target organ toxicity – single exposure
HazCat3

StorageWorking volumes in amber bottles, stored in primary litho area; stock bottles in Cabinet 14 (flammables fridge)
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
CommentsStandard recipe yields ~14 µm resist thickness.
Status

Status
titleStocked
  




Warning
titleCheck First

Please contact a nanoFAB staff member for uses not listed above.


Embedded Google Drive File
urlhttps://drive.google.com/file/d/0B5USr1fI1bMeZDBZT1I1UFJkeTQ/view?usp=sharing&resourcekey=0-24BaEZUoegxrJf5AmybViA
fullwidthtrue
height600