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This how to describes the process for signing out precious metals for use in the 10k deposition systems. The lockers are configured as follows:


Target / CrucibleFor use in
Locker #13in Au Sputter Target

KJLC CMS-18 Sputter Sputtering System #1 - Bob

KJLC CMS-18 Sputter Sputtering System #2 - Doug

Locker #23in Pt Sputter Target

KJLC CMS-18 Sputter Sputtering System #1 - Bob

KJLC CMS-18 Sputter Sputtering System #2 - Doug

Locker #3PVD-75 Au CrucibleElectron-Beam Evaporation System #2 (PVD-75)

Locker #4

Gomez Au CrucibleElectron-Beam Evaporation System #1 (Gomez)
Locker #5Achilles Au CrucibleElectron-Beam Evaporation System #3 (Achilles)




Warning

A $300 deposit is charged once you sign out one of the precious metal target or crucible. This charge will be removed and the actual charged based on the process record sheet will be added within 7 days of your usage. 


Step-by-step guide

  1. Login to the desired piece of deposition equipment
  2. Sign out the precious metal target or crucible by logging into the appropriate item
    1. This will pop open the locker containing the precious material
    2. Retrieve the material from the locker
    3. Leave the door open
  3. Once you have completed your process, log out of both the precious material, and the piece of deposition equipment
  4. Return the material to the appropriate locker and close the door
  5. Fill out the appropriate precious material log sheet and hand it in to the nanoFAB staff



Show If
groupnf-staff


Note
titleStaff Only

Administration Steps

  1. When the user logs into the precious material, they will be charged a $300 deposit. This is done by applying a min 1 hr charge to the "tool" configured as a precious material
  2. The user must complete on one of the two following documents and submit them once their usage is complete:
    1. Google Drive Live Link
      urlhttps://docs.google.com/document/d/1u3vpfxTAYCUynFoihCzO6_i4_5UyKBbeAOGPRFhmiJY/edit?usp=drivesdk
    2.  
      Google Drive Live Link
      urlhttps://docs.google.com/document/d/191X6vTflkHEybIzqOZ95olQ2XGka0Sj2UrAkrEA8TVM/edit?usp=drivesdk
  3. Once the sheets are submitted, create a material charge for the associated material.
    1. If entering an e-beam usage, select "Precious Metal - e-beam - Au" and enter the total number of grams used. 
    2. If entering a sputter usage, select "Precious Metal - ToolName - Material" and enter the total number of seconds used.
  4. Once the material has been entered, remove the deposit charge by locating the associated usage, and entering 0 for the amount charged. Do not delete the usage.