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nanoFAB Equipment
Equipment List
Trion Orion PECVD
Trion PECVD process information
Page History
Versions Compared
Old Version
2
changes.mady.by.user
Aaron Hryciw
Saved on
May 17, 2021
compared with
New Version
3
changes.mady.by.user
Aaron Hryciw
Saved on
May 17, 2021
Previous Change: Difference between versions 1 and 2
Next Change: Difference between versions 3 and 4
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Page properties
id
SOP
Equipment
Trion
Phantom RIE
Orion PECVD
Synonyms
PECVD
Process Area
Equipment process area
EquipmentArea
Deposition
Embedded Google Drive File
url
https://drive.google.com/file/d/1j9a8ogfSwDUQq72rZ0Yy9hA9iJDeRLRA/view?usp=drivesdk
fullwidth
true
height
600
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