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titleOverview

Differential Scanning Calorimeters (DSC) measure temperatures and heat flows associated with thermal transitions in a material.



Page properties
idequipment-properties


LMACS NameDifferential Scanning Calorimeter (DSC)
Confluence Label

Process Area

Equipment process area
EquipmentAreaCharacterization

ModelQ1000
VendorTA instrument
Team




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groupnf-staff


Serial Number
UofA Asset Tag Number
Service Contract

   

Status
colourRed
titleNO

Purchase Info
Installation



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Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC



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Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
sortname
urlhttps://drive.google.com/drive/folders/13GvWe_iWN3cHrio1UV6Aw_9i87qozSUJ


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