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iconfalse
titleOverview



Page properties
idequipment-properties


LMACS Name

Atomic Force Microscope (Dimension Edge)

Confluence Label

bruker-dimension-edge-afm

Process Area

Equipment process area
EquipmentAreaCharacterization

Model
VendorBruker
Team




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groupnf-staff


Serial Number
UofA Asset Tag Number
Service Contract

   

Status
colourRed
titleNO

Purchase Info
Installation




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groupnf-staff

Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC



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groupnf-staff

Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/13GvWe_iWN3cHrio1UV6Aw_9i87qozSUJ1OWy77mHAFUMIrxk0gwFcO4PzWOsLIH4D


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