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Infonote

Complete this form for each process run on the LPCVD Doped Poly Tube (Tube 4). The results of this form are used to track and drive tube changes. Failure to accurately complete this form may lead to component failure, and extended system downtime



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urlhttps://docs.google.com/forms/d/12UrVkJlRfkDlzzj5hlpAC-8KVUX87zK4iiwWsiIP-Wo/edit?usp=drivesdk

Google Drive Live Link
urlhttps://docs.google.com/spreadsheets/d/1rylh_EExNqfgttURuPNG7Na6ZMnOvzdSlyuynp71Ovw/edit?usp=drivesdk