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titleOverview

Lucus Pro4 4000 sheet and bulk resistivity measurement system with Keithley 2601A sourcemeter, range: 1 mΩ to 100 MΩ per cm square. Identify Si wafer N/P type.



Page properties
idequipment-properties


LMACS Name

Four-Point Probe (Pro4 4000)

Confluence Label

lucasLabs-pro4-6M00

Process Area

Equipment process area
EquipmentAreaCharacterization

ModelPro4-6M00
VendorLucas Labs
Team

Nancy Zhang Nastaran Yousefi Devin Fortier Peng Li 




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Serial Number1008123
UofA Asset Tag Number545140
Service Contract

   

Status
colourRed
titleNO

Purchase Info
Installation



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Contacts


NameCompanyEmailPhone
Technical Contact

Richard Dickson 

Signatonerichard.dickson@signatone.com
Sales ContactMarc PinardSignatone

sales@signatone.com, marc.pinard@signatone.com

408-846-1404 



System Features

Resistivity Range1 mΩ to 100 MΩ per cm square
Current Rangeis 5E-08 to 1000 mA.
Minimum sample size4 *4 mm


Key Documents

SOP

Four-Point Probe (Pro4 4000) SOP

Hazard Assessment

Characterization Lab ECERF W1-040 General HA



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Staff Documents

Operator Manual4prob manual.pdf
Service Manual
Installation Guide
System Drawings
Probe headSp4-[40][045][TC][1.6]Y, part number style: SP4-{space btw tip][spring pressure in gram][material][tip radius in inch]

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/1WGiHnjVSsdaCyoKhTi_vmMCJcQoFTGYH


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