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ProductAZ 12XT-20PL-10 photoresist
Manufacturer

EMD Performance Materials Corp.

Composition55–60% 1-Methoxy-2-propanol acetate, 20–25% Non-hazardous styrene-acrylate polymer, <0.3% 2-Methoxy-1-propanol acetate, 15–20% Cresol novolak resin; liquid
SynonymsAZ 12XT
Typical UsesChemically amplified thick positive photoresist
Hazards

Nfpa704
HealthNum2
FlamNum2
 
Whmis picts
Flamtrue
Excltrue

Hazcat
HazClassFlammable liquids
HazCat3
,
Hazcat
HazClassSpecific target organ toxicity – single exposure
HazCat3
(central nervous system)

StorageWorking volumes in amber bottles, stored in primary litho area; stock bottle in resist fridge outside W1-040
DisposalSolid: Organic waste / organic sharps waste containers in primary or secondary litho areas.  Liquid: solvent waste bottles in litho wet decks or wet decks 1A/1B/2A.
Comments
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groupnf-staff


Import Request

Ali Banss, Sheba Microsystems, . [Request]





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titleCheck First

Please contact a nanoFAB staff member for uses not listed above.


Embedded Google Drive File
urlhttps://drive.google.com/file/d/1J1wFGEiUxfTNC0IpUfKqgJZTcCg2vQVk/view?usp=drivesdk
fullwidthtrue
height600

Additional SDS Sheets