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Note
iconfalse
titleOverview



Page properties
idequipment-properties


LMACS NameEllipsometer (M-2000V)
Confluence LabelJA woollam-m2000-ellipsometer  
Process Area

Equipment process area
EquipmentAreaCharacterization

ModelM-2000V
VendorJ.A. Woollam
Team

Peng Li Shiau-Yin Wu 




Show If
groupnf-staff


Serial Number
UofA Asset Tag Number
Service Contract

Status
colourGreen
titleYes
   
Status
colourRed
titleNO



Image Added


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Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)

100 mm150 mmGas SpeciesO2C4F8SF6Ar

ICP Power3 kWRF Power300 WChuck-150 ºC (min)80 ºC (max)mechanical clampHBC

Key Documents

SOP
Hazard Assessment



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groupnf-staff

Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/13GvWe_iWN3cHrio1UV6Aw_9i87qozSUJ16ewpJ3x0ErnIVBhFreOzOc4kGWTjfFFB


Related Documents

Content by Label
cqllabel = "equipment"in ("vase-ellipsometer","vase-m2000-ellipsometer")