| Info |
|---|
This table lists material parameters for the quartz crystal monitors (QCMs) used in several PVD tools in the 10k area: Electron-Beam Evaporation System #1 (Gomez), Electron-Beam Evaporation System #2 (PVD-75), GLAD System (Achilles), AJA Orion 8 Sputtering System (Moe). |
| Note |
|---|
The QCM controller for AJA Orion 8 Sputtering System (Moe) uses acoustic impedance (Z), whereas the controllers for all other tools use Z-factor (a.k.a. Z-ratio) |
In the following table, * denotes that the Z-factor and acoustic impedance is unknown; a method for determining Z-factor empirically is given following the table.
| Material name | Chemical formula | Density ρ (g•cm–3) | Z-factor | Acoustic impedance Z (×106 kg•m–2•s–1) |
|---|---|---|---|---|
| Aluminum | Al | 2.700 | 1.080 | 8.18 |
| Aluminum antimonide | AISb | 4.360 | 0.743 | 11.88 |
| Aluminum carbide | Al4C3 | 2.360 | *1.000 | *8.83 |
| Aluminum fluoride | AIF3 | 3.070 | *1.000 | *8.83 |
| Aluminum nitride | AIN | 3.260 | *1.000 | *8.83 |
| Aluminum oxide | Al2O3 | 3.970 | 0.336 | 26.28 |
| Antimony | Sb | 6.620 | 0.768 | 11.50 |
| Antimony trioxide | Sb2O3 | 5.200 | *1.000 | *8.83 |
| Antimony trisulfide | Sb2S3 | 4.640 | *1.000 | *8.83 |
| Arsenic | As | 5.730 | 0.966 | 9.14 |
| Arsenic selenide | As2Se3 | 4.750 | *1.000 | *8.83 |
| Barium | Ba | 3.500 | 2.100 | 4.20 |
| Barium fluoride | BaF2 | 4.886 | 0.793 | 11.13 |
| Barium nitrate | BaN2O6 | 3.244 | 1.261 | 7.00 |
| Barium oxide | BaO | 5.720 | *1.000 | *8.83 |
| Barium titanate (cubic) | BaTiO3 | 6.035 | 0.412 | 21.43 |
| Barium titanate (tetragonal) | BaTiO3 | 5.999 | 0.464 | 19.03 |
| Beryllium | Be | 1.850 | 0.543 | 16.26 |
| Beryllium fluoride | BeF2 | 1.990 | *1.000 | *8.83 |
| Beryllium oxide | BeO | 3.010 | *1.000 | *8.83 |
| Bismuth | Bi | 9.800 | 0.790 | 11.18 |
| Bismuth fluoride | BiF3 | 5.320 | *1.000 | *8.83 |
| Bismuth oxide | Bi2O3 | 8.900 | *1.000 | *8.83 |
| Bismuth selenide | Bi2Se3 | 6.820 | *1.000 | *8.83 |
| Bismuth telluride | Bi2Te3 | 7.700 | *1.000 | *8.83 |
| Bismuth trisulfide | Bi2S3 | 7.390 | *1.000 | *8.83 |
| Boron | B | 2.370 | 0.389 | 22.70 |
| Boron carbide | B4C | 2.370 | *1.000 | *8.83 |
| Boron nitride | BN | 1.860 | *1.000 | *8.83 |
| Boron oxide | B2O3 | 1.820 | *1.000 | *8.83 |
| Cadmium | Cd | 8.640 | 0.682 | 12.95 |
| Cadmium fluoride | CdF2 | 6.640 | *1.000 | *8.83 |
| Cadmium oxide | CdO | 8.150 | *1.000 | *8.83 |
| Cadmium selenide, | CdSe | 5.810 | *1.000 | *8.83 |
| Cadmium sulfide | CdS | 4.830 | 1.020 | 8.66 |
| Cadmium telluride | CdTe | 6.200 | 0.980 | 9.01 |
| Calcium | Ca | 1.550 | 2.620 | 3.37 |
| Calcium fluoride | CaF2 | 3.180 | 0.775 | 11.39 |
| Calcium oxide | CaO | 3.350 | *1.000 | *8.83 |
| Calcium silicate (3) | CaO-SiO2 | 2.900 | *1.000 | *8.83 |
| Calcium sulfate | CaSO4 | 2.962 | 0.955 | 9.25 |
| Calcium titanate | CaTiO3 | 4.100 | *1.000 | *8.83 |
| Calcium tungstate | CaWO4 | 6.060 | *1.000 | *8.83 |
| Carbon (diamond) | C | 3.520 | 0.220 | 40.14 |
| Carbon (graphite) | C | 2.250 | 3.260 | 2.71 |
| Cerium | Ce | 6.780 | *1.000 | *8.83 |
| Cerium (III) fluoride | CeF3 | 6.160 | *1.000 | *8.83 |
| Cerium (IV) dioxide | CeO2 | 7.130 | *1.000 | *8.83 |
| Cesium | Cs | 1.870 | *1.000 | *8.83 |
| Cesium bromide | CsBr | 4.456 | 1.410 | 6.26 |
| Cesium chloride | CsCI | 3.988 | 1.399 | 6.31 |
| Cesium iodide | CsI | 4.516 | 1.542 | 5.73 |
| Cesium sulfate | Cs2SO4 | 4.243 | 1.212 | 7.29 |
| Chiolite | Na5Al3F14 | 2.900 | *1.000 | *8.83 |
| Chromium | Cr | 7.200 | 0.305 | 28.95 |
| Chromium (III) oxide | Cr2O3 | 5.210 | *1.000 | *8.83 |
| Chromium boride | CrB | 6.170 | *1.000 | *8.83 |
| Chromium carbide | Cr3C2 | 6.680 | *1.000 | *8.83 |
| Cobalt | Co | 8.900 | 0.343 | 25.74 |
| Cobalt oxide | CoO | 6.440 | 0.412 | 21.43 |
| Copper | Cu | 8.930 | 0.437 | 20.21 |
| Copper (I) sulfide (α) | Cu2S | 5.600 | 0.690 | 12.80 |
| Copper (I) sulfide (β) | Cu2S | 5.800 | 0.670 | 13.18 |
| Copper (II) sulfide | CuS | 4.600 | 0.820 | 10.77 |
| Copper oxide | Cu2O | 6.000 | *1.000 | *8.83 |
| Cryolite | Na3AIF6 | 2.900 | *1.000 | *8.83 |
| Dysprosium | Dy | 8.550 | 0.600 | 14.72 |
| Dysprosium oxide | Dy2O3 | 7.810 | *1.000 | *8.83 |
| Erbium | Er | 9.050 | 0.740 | 11.93 |
| Erbium oxide | Er2O3 | 8.640 | *1.000 | *8.83 |
| Europium | Eu | 5.260 | *1.000 | *8.83 |
| Europium fluoride | EuF2 | 6.500 | *1.000 | *8.83 |
| Gadolinium | Gd | 7.890 | 0.670 | 13.18 |
| Gadolinium oxide | Gd2O3 | 7.410 | *1.000 | *8.83 |
| Gallium | Ga | 5.930 | 0.593 | 14.89 |
| Gallium antimonide | GaSb | 5.600 | *1.000 | *8.83 |
| Gallium arsenide | GaAs | 5.310 | 1.590 | 5.55 |
| Gallium nitride | GaN | 6.100 | *1.000 | *8.83 |
| Gallium oxide (β) | Ga2O3 | 5.880 | *1.000 | *8.83 |
| Gallium phosphide | GaP | 4.100 | *1.000 | *8.83 |
| Germanium | Ge | 5.350 | 0.516 | 17.11 |
| Germanium nitride | Ge3N2 | 5.200 | *1.000 | *8.83 |
| Germanium oxide | GeO2 | 6.240 | *1.000 | *8.83 |
| Germanium telluride | GeTe | 6.200 | *1.000 | *8.83 |
| Gold | Au | 19.300 | 0.381 | 23.18 |
| Hafnium | Hf | 13.090 | 0.360 | 24.53 |
| Hafnium boride, | HfB2 | 10.500 | *1.000 | *8.83 |
| Hafnium carbide | HfC | 12.200 | *1.000 | *8.83 |
| Hafnium nitride | HfN | 13.800 | *1.000 | *8.83 |
| Hafnium oxide | HfO2 | 9.680 | *1.000 | *8.83 |
| Hafnium silicide | HfSi2 | 7.200 | *1.000 | *8.83 |
| Holminum | Ho | 8.800 | 0.580 | 15.22 |
| Holminum oxide | Ho2O3 | 8.410 | *1.000 | *8.83 |
| Inconel | NiCrFe | 8.500 | *1.000 | *8.83 |
| Indium | In | 7.300 | 0.841 | 10.50 |
| Indium antimonide | InSb | 5.760 | 0.769 | 11.48 |
| Indium arsenide | InAs | 5.700 | *1.000 | *8.83 |
| Indium phosphide | InP | 4.800 | *1.000 | *8.83 |
| Indium selenide | In2Se3 | 5.700 | *1.000 | *8.83 |
| Indium sesquioxide | In2O3 | 7.180 | *1.000 | *8.83 |
| Indium telluride | In2Te3 | 5.800 | *1.000 | *8.83 |
| Iridium | Ir | 22.400 | 0.129 | 68.45 |
| Iron | Fe | 7.860 | 0.349 | 25.30 |
| Iron oxide | Fe2O3 | 5.240 | *1.000 | *8.83 |
| Iron oxide | FeO | 5.700 | *1.000 | *8.83 |
| Iron sulfide | FeS | 4.840 | *1.000 | *8.83 |
| Lanthanum | La | 6.170 | 0.920 | 9.60 |
| Lanthanum boride | LaB6 | 2.610 | *1.000 | *8.83 |
| Lanthanum fluoride | LaF3 | 5.940 | *1.000 | *8.83 |
| Lanthanum oxide | La2O3 | 6.510 | *1.000 | *8.83 |
| Lead | Pb | 11.300 | 1.130 | 7.81 |
| Lead chloride | PbCl2 | 5.850 | *1.000 | *8.83 |
| Lead fluoride | PbF2 | 8.240 | 0.661 | 13.36 |
| Lead oxide | PbO | 9.530 | *1.000 | *8.83 |
| Lead selenide | PbSe | 8.100 | *1.000 | *8.83 |
| Lead Stannate | PbSnO3 | 8.100 | *1.000 | *8.83 |
| Lead sulfide | PbS | 7.500 | 0.566 | 15.60 |
| Lead telluride | PbTe | 8.160 | 0.651 | 13.56 |
| Lithium | Li | 0.530 | 5.900 | 1.50 |
| Lithium bromide | LiBr | 3.470 | 1.230 | 7.18 |
| Lithium fluoride | LiF | 2.638 | 0.778 | 11.35 |
| Lithium niobate | LiNbO3 | 4.700 | 0.463 | 19.07 |
| Lutetium | Lu | 9.840 | *1.000 | *8.83 |
| Magnesium | Mg | 1.740 | 1.610 | 5.48 |
| Magnesium aluminate | MgAI2O4 | 3.600 | *1.000 | *8.83 |
| Magnesium fluoride | MgF2 | 3.180 | 0.637 | 13.86 |
| Magnesium oxide | MgO | 3.580 | 0.411 | 21.48 |
| Manganese | Mn | 7.200 | 0.377 | 23.42 |
| Manganese (II) sulfide | MnS | 3.990 | 0.940 | 9.39 |
| Manganese oxide | MnO | 5.390 | 0.467 | 18.91 |
| Mercury | Hg | 13.460 | 0.740 | 11.93 |
| Molybdenum | Mo | 10.200 | 0.257 | 34.36 |
| Molybdenum boride | MoB2 | 7.120 | *1.000 | *8.83 |
| Molybdenum carbide | Mo2C | 9.180 | *1.000 | *8.83 |
| Molybdenum disulfide | MoS2 | 4.800 | *1.000 | *8.83 |
| Molybdenum Trioxdide | MoO3 | 4.700 | *1.000 | *8.83 |
| Neodynium | Nd | 7.000 | *1.000 | *8.83 |
| Neodynium fluoride | NdF3 | 6.506 | *1.000 | *8.83 |
| Neodynium oxide | Nd2O3 | 7.240 | *1.000 | *8.83 |
| Nichrome | NiCr | 8.500 | *1.000 | *8.83 |
| Nickel | Ni | 8.910 | 0.331 | 26.68 |
| Nickel oxide | NiO | 7.450 | *1.000 | *8.83 |
| Niobium | Nb | 8.578 | 0.492 | 17.95 |
| Niobium (V) oxide | Nb2O5 | 4.470 | *1.000 | *8.83 |
| Niobium boride | NbB2 | 6.970 | *1.000 | *8.83 |
| Niobium carbide | NbC | 7.820 | *1.000 | *8.83 |
| Niobium nitride | NbN | 8.400 | *1.000 | *8.83 |
| Niobium trioxide | Nb2O3 | 7.500 | *1.000 | *8.83 |
| Palladium | Pd | 12.038 | 0.357 | 24.73 |
| Palladium oxide | PdO | 8.310 | *1.000 | *8.83 |
| Parylene (Union Carbide) | C8H8 | 1.100 | *1.000 | *8.83 |
| Permalloy | NiFe | 8.700 | *1.000 | *8.83 |
| Phosphorus nitride | P3N5 | 2.510 | *1.000 | *8.83 |
| Platinum | Pt | 21.400 | 0.245 | 36.04 |
| Platinum oxide | PtO2 | 10.200 | *1.000 | *8.83 |
| Polonium | Po | 9.400 | *1.000 | *8.83 |
| Potassium | K | 0.860 | 10.189 | 0.87 |
| Potassium bromide | KBr | 2.750 | 1.893 | 4.66 |
| Potassium chloride | KCI | 1.980 | 2.050 | 4.31 |
| Potassium fluoride | KF | 2.480 | *1.000 | *8.83 |
| Potassium iodide | KI | 3.128 | 2.077 | 4.25 |
| Praseodymium | Pr | 6.780 | *1.000 | *8.83 |
| Praseodymium oxide | Pr2O3 | 6.880 | *1.000 | *8.83 |
| Radium | Ra | 5.000 | *1.000 | *8.83 |
| Rhenium | Re | 21.040 | 0.150 | 58.87 |
| Rhodium | Rh | 12.410 | 0.210 | 42.05 |
| Rubidium | Rb | 1.530 | 2.540 | 3.48 |
| Rubidium iodide | Rbl | 3.550 | *1.000 | *8.83 |
| Ruthenium | Ru | 12.362 | 0.182 | 48.52 |
| Samarium | Sm | 7.540 | 0.890 | 9.92 |
| Samarium oxide | Sm2O3 | 7.430 | *1.000 | *8.83 |
| Scandium | Sc | 3.000 | 0.910 | 9.70 |
| Scandium oxide | Sc2O3 | 3.860 | *1.000 | *8.83 |
| Selenium | Se | 4.810 | 0.864 | 10.22 |
| Silicon | Si | 2.320 | 0.712 | 12.40 |
| Silicon (II) oxide | SiO | 2.130 | 0.870 | 10.15 |
| Silicon carbide | SiC | 3.220 | *1.000 | *8.83 |
| Silicon dioxide | SiO2 | 2.648 | 1.000 | 8.83 |
| Silicon nitride | Si3N4 | 3.440 | *1.000 | *8.83 |
| Silver | Ag | 10.500 | 0.529 | 16.69 |
| Silver bromide | AgBr | 6.470 | 1.180 | 7.48 |
| Silver chloride | AgCI | 5.560 | 1.320 | 6.69 |
| Sodium | Na | 0.970 | 4.800 | 1.84 |
| Sodium bromide | NaBr | 3.200 | *1.000 | *8.83 |
| Sodium chlorate | NaCIO3 | 2.164 | 1.565 | 5.64 |
| Sodium chloride | NaCI | 2.170 | 1.570 | 5.62 |
| Sodium fluoride | NaF | 2.558 | 0.949 | 9.30 |
| Sodium nitrate | NaNO3 | 2.270 | 1.194 | 7.40 |
| Spinel | MgAI2O6 | 8.000 | *1.000 | *8.83 |
| Strontium | Sr | 2.600 | *1.000 | *8.83 |
| Strontium fluoride | SrF2 | 4.277 | 0.727 | 12.15 |
| Strontium oxide | SrO | 4.990 | 0.517 | 17.08 |
| Sulfur | S8 | 2.070 | 2.290 | 3.86 |
| Supermalloy | NiFeMo | 8.900 | *1.000 | *8.83 |
| Tantalum | Ta | 16.600 | 0.262 | 33.70 |
| Tantalum (V) oxide | Ta2O5 | 8.200 | 0.300 | 29.43 |
| Tantalum boride | TaB2 | 11.150 | *1.000 | *8.83 |
| Tantalum carbide | TaC | 13.900 | *1.000 | *8.83 |
| Tantalum nitride | TaN | 16.300 | *1.000 | *8.83 |
| Technetium | Tc | 11.500 | *1.000 | *8.83 |
| Tellurium | Te | 6.250 | 0.900 | 9.81 |
| Tellurium oxide | TeO2 | 5.990 | 0.862 | 10.24 |
| Terbium | Tb | 8.270 | 0.660 | 13.38 |
| Thallium | TI | 11.850 | 1.550 | 5.70 |
| Thallium bromide | TIBr | 7.560 | *1.000 | *8.83 |
| Thallium chloride | TICI | 7.000 | *1.000 | *8.83 |
| Thallium iodide (B) | TII | 7.090 | *1.000 | *8.83 |
| Thorium | Th | 11.694 | 0.484 | 18.24 |
| Thorium (IV) fluoride | ThF4 | 6.320 | *1.000 | *8.83 |
| Thorium dioxide | ThO2 | 9.860 | 0.284 | 31.09 |
| Thorium oxyfluoride | ThOF2 | 9.100 | *1.000 | *8.83 |
| Tin | Sn | 7.300 | 0.724 | 12.20 |
| Tin oxide | SnO2 | 6.950 | *1.000 | *8.83 |
| Tin selenide | SnSe | 6.180 | *1.000 | *8.83 |
| Tin sulfide | SnS | 5.080 | *1.000 | *8.83 |
| Tin telluride | SnTe | 6.440 | *1.000 | *8.83 |
| Titanium | Ti | 4.500 | 0.628 | 14.06 |
| Titanium (IV) oxide | TiO2 | 4.260 | 0.400 | 22.08 |
| Titanium boride | TiB2 | 4.500 | *1.000 | *8.83 |
| Titanium carbide | TiC | 4.930 | *1.000 | *8.83 |
| Titanium nitride | TiN | 5.430 | *1.000 | *8.83 |
| Titanium oxide | TiO | 4.900 | *1.000 | *8.83 |
| Titanium sesquioxide | Ti2O3 | 4.600 | *1.000 | *8.83 |
| Triuranium octoxide | U3O8 | 8.300 | *1.000 | *8.83 |
| Tungsten | W | 19.300 | 0.163 | 54.17 |
| Tungsten boride | WB2 | 10.770 | *1.000 | *8.83 |
| Tungsten carbide | WC | 15.600 | 0.151 | 58.48 |
| Tungsten disilicide | WSi2 | 9.400 | *1.000 | *8.83 |
| Tungsten disulfide | WS2 | 7.500 | *1.000 | *8.83 |
| Tungsten trioxide | WO3 | 7.160 | *1.000 | *8.83 |
| Uranium | U | 19.050 | 0.238 | 37.10 |
| Uranium dioxide | UO2 | 10.970 | 0.286 | 30.87 |
| Uranium oxide | U4O9 | 10.969 | 0.348 | 25.37 |
| Vanadium | V | 5.960 | 0.530 | 16.66 |
| Vanadium boride | VB2 | 5.100 | *1.000 | *8.83 |
| Vanadium carbide | VC | 5.770 | *1.000 | *8.83 |
| Vanadium dioxide | VO2 | 4.340 | *1.000 | *8.83 |
| Vanadium nitride | VN | 6.130 | *1.000 | *8.83 |
| Vanadium pentoxide | V2O5 | 3.360 | *1.000 | *8.83 |
| Ytterbium | Yb | 6.980 | 1.130 | 7.81 |
| Ytterbium oxide | Yb2O3 | 9.170 | *1.000 | *8.83 |
| Yttrium | Y | 4.340 | 0.835 | 10.57 |
| Yttrium oxide | Y2O3 | 5.010 | *1.000 | *8.83 |
| Zinc | Zn | 7.040 | 0.514 | 17.18 |
| Zinc antimonide | Zn3Sb2 | 6.300 | *1.000 | *8.83 |
| Zinc fluoride | ZnF2 | 4.950 | *1.000 | *8.83 |
| Zinc oxide | ZnO | 5.610 | 0.556 | 15.88 |
| Zinc selenide | ZnSe | 5.260 | 0.722 | 12.23 |
| Zinc sulfide | ZnS | 4.090 | 0.775 | 11.39 |
| Zinc telluride | ZnTe | 6.340 | 0.770 | 11.47 |
| Zirconium | Zr | 6.490 | 0.600 | 14.72 |
| Zirconium boride | ZrB2 | 6.080 | *1.000 | *8.83 |
| Zirconium carbide | ZrC | 6.730 | 0.264 | 33.45 |
| Zirconium nitride | ZrN | 7.090 | *1.000 | *8.83 |
| Zirconium oxide | ZrO2 | 5.600 | *1.000 | *8.83 |
| Anchor | ||||
|---|---|---|---|---|
|
Z-factor, also known as Z-ratio, is used to match the acoustic properties of the material being deposited to the acoustic properties of the base quartz material of the QCM sensor crystal, and is defined as:
Z-factor = Zq / Zm
where Zq = 8.83×106 kg•m–2•s–1 is the acoustic impedance of quartz. For example, the acoustic impedance of gold is Z = 23.18×106 kg•m–2•s–1 , so:
Z-factorAu = 8.83 / 23.18 = 0.381
Unfortunately, Z-factor is not readily available for many materials, but it can be calculated empirically using this method:
- Deposit the material until crystal life is near 50%, or near the end of life, whichever is sooner.
- Place a new substrate adjacent to the used quartz sensor.
- Set QCM density to the calibrated value, tooling to 100%, and zero thickness.
- Deposit approximately 1000 to 5000 Å of material on the substrate.
- Use a profilometer or interferometer to measure the actual substrate film thickness.
- Adjust the Z-factor of the instrument until the correct thickness reading is shown.
Another alternative is to change crystals frequently: for a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z-factor.
The information on this page is adapted from the KJLC FTC-2800 Multi-Channel Quartz Crystal Controller operation manual.