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Converting from DXF saved from AutoCAD to GDSII often produces unintended results/defects in the design.  It is highly recommended to create your GDSII pattern using a native GDSII editor such as KLayout, or a script-based approach (Raith_GDSII, python-gdsii), rather than creating the design in AutoCAD and converting to GDSII.  Please see this page on GDSII design software options.

Step-by-step guide

  1. Make design as normal in AutoCAD; use mm for units.
  2. Make all features into polylines → select all elements → MPEDIT → Join.
  3. Select each element and use HATCH function → polygons should now appear shaded.
  4. Export the file as DXF.
  5. Open DXF file in KLayout.
    • N.B.  Before opening the file, check File > Reader Options, under the DXF tab and ensure that Database unit is 0.001 µm and DXF file unit is 1000 µm (assuming mm mode was used in AutoCAD).
  6. Ensure that all elements to be patterned are (shaded) polygons, and verify that the scaling is correct (GDSII assumes units of µm, not mm).
  7. Save as GDSII.