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The Chiaro system utilizes a remote inductively coupled low-pressure RF plasma source (GV10x DownStream Asher), which provides an advanced method of cleaning carbon contamination for electron microscopy samples. |
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Contacts
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System Features
Sample Application | Remove organic contamination for SEM and TEM sample preparation | |
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Gas Species | N2/O2 | N2/H2 |
High Plasma Power | 49-99 W | |
Low Plasma Power | 1-49 W | |
Decontamination rate | near 1nm/min carbon at 20W | near 0.1 nm/min carbon at 20 W |
Key Documents
SOP |
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Hazard Assessment |
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Staff Documents
Drive Folder
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Related Documents
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