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The pattern generator is not available for general user use. For information on how to submit a mask for fabrication visit - Submit a file for photomask fabrication |
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A commercial-quality laser pattern generator for writing photomasks. The auto-load capability of this tool enables high-quality photomasks to be produced with high throughput. |
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Contacts
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System Features
Stocked photomask blanks consist of 100 nm Cr on soda-lime glass, 5" × 5" or 7" × 7" in size
2.0 µm minimum feature size with 10 mm lens (default lens in system)
0.7 µm features possible with 4 mm lens (1 µm standard)
| Mask Dimensions | 5" x 5" | 7" x 7" |
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| Mask Material | soda-lime glass | |
| Chrome Layer | 100 nm | |
| Robotic autoloader |
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Staff Documents
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