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titleOverview

An automatic HMDS vapour prime oven to promote photoresist adhesion on silicon, silicon dioxide, and silicon nitride surfaces.



Page properties
idequipment-properties


LMACS NameYES Oven (HMDS #1)
Confluence Labelyes-yes3ta-hmds-oven
Process Area

Equipment process area
EquipmentAreaLithography

ModelYES3TA
VendorYield Engineering
Team




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groupnf-staff


Serial Number89181
UofA Asset Tag Number
Service Contract

Status
colourRed
titleNO




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groupnf-staff

Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Automatic HMDS dispense

Tooling for 6" or 4" wafers and pieces.



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groupnf-staff

Staff Documents

Operator Manual

Google Drive Live Link
urlhttps://drive.google.com/file/d/16j8bhkQcBGnZFGhsI-4TzBTpzrl27s-J/view?usp=drivesdk

Training Guide

Google Drive Live Link
urlhttps://drive.google.com/file/d/1aLph51g_e1yMfmJVHMvIYpWsvdFXvH2B/view?usp=drivesdk

System Drawings

Google Drive Live Link
urlhttps://drive.google.com/file/d/1crpQpK9vN9SfujCSxvCWO9TDWmmHK7HO/view?usp=drivesdk

Electrical Schematic

Google Drive Live Link
urlhttps://drive.google.com/file/d/16_4qqyhYEuPfAE3Xrus-R5wZem6BxpWz/view?usp=drivesdk

Piping Diagram

Google Drive Live Link
urlhttps://drive.google.com/file/d/1wLYARFnHaHiKoLbpqa51P_dPJ4CCpcOG/view?usp=drivesdk

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/15XKFQbwJSkeBezlT4itK5qJ_TAfSki44


Related Documents

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