Versions Compared

Old Version 9

changes.mady.by.user Adam Pettigrew

Saved on

compared with

New Version 10

changes.mady.by.user Adam Pettigrew

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Note
iconfalse
titleOverview

Hotplate set-up for most EBL resist spinning applications.



Page properties
idequipment-properties


LMACS NameBrewer Spinner and Hotplate
Confluence Labelbrewer-1300x-bake-system
Process Area

Equipment process area
EquipmentAreaLithography

Model1300X
VendorBrewer Science
Team

Stephanie Bozic Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Michael Hume Adam Pettigrew




Show If
groupnf-staff


Serial Number2114174
UofA Asset Tag Number
Service Contract

Status
colourRed
titleNO




Show If
groupnf-staff

Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Uniform and reliable, always set at 180°C
Contact, vacuum, and proximity bake methods
Hotplate substrate sizes: <1 cm to 200 mm round; 8" × 8" square

Programmable lift pins to raise substrates from 0.000" to 0.750" in 0.001" increments


Key Documents

SOPBrewer Spinner and Hotplate SOP
Hazard AssessmentBrewer Spinner and Hotplate HA



Show If
groupnf-staff

Staff Documents

Operator/User Manual

Google Drive Live Link
urlhttps://drive.google.com/file/d/1ikJ-lbs3Q5e-tgIHlTTSLabu89FKzeLQ/view?usp=drivesdk

Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/1ginumRE0FONsYguljhWBdWrHyoFYY0F-


Related Documents

Content by Label
cqllabel in ("brewer","lithography","1300X")