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titleOverview

The UV Flood Exposure system provides uniform UV exposure over a wide area. It is primarily used for resist stripping and curing.



Page properties
idequipment-properties


LMACS NameUV Flood Exposure System (Sunny)
Confluence Labelabm-uv-flood-exposure-system-sunny
Process Area

Equipment process area
EquipmentAreaLithography

ModelN/A
VendorABM USA
Team

Breanna Cherkawski Scott Munro Adam Pettigrew




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groupnf-staff


Serial Number1-27-99
UofA Asset Tag NumberN/A
Service Contract

Status
colourRed
titleNO




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Contacts


NameCompanyEmailPhone
Technical ContactDan MaurerABM USAdan@abmusainc.com(408)-972-5085
Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces100 mm150 mmUp to 7"x7"
ExposureManualAutomated


Key Documents

SOPABM UV Flood Exposure System - Sunny - SOP
Hazard AssessmentABM UV Flood Exposure System - Sunny - HA



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Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/1-7EibbWN3EMozuWsI5Zi6wW7LAGaOBtU


Related Documents

Content by Label
cqllabel in ("sunny","abm-uv-flood-exposure-system-sunny","lithography")