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titleOverview

SemiTool 870-S double stack SRD. Top unit suitable for up to 150 mm substrates, bottom rotor suitable for 100m, round substrates.



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idequipment-properties





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Serial NumberSRD-01091
UofA Asset Tag Number717988
Service Contract

Status
colourRed
titleNO




Top - 150mm Round

Bottom - 100mm Round



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Contacts


NameCompanyEmailPhone
Technical ContactDaniel MullanySitek Processdmullany@sitekprocess.com1 916-797-9000 x2201
Sales ContactJim MullanySitek Processjmullany@sitekprocess.com1 916-975-2200



System Features

Top Rotor150 mm (A190-60M-0215)
Botom Rotor100 mm (A190-40M-0215)
NitrogenN2 purge saver
ControlSitek SlickDevice SI touch screen controller
RecipesUp to 20 programmable recipes
Capacity25 wafers


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Staff Documents

Operator Manual

Google Drive Live Link
urlhttps://drive.google.com/file/d/0B800HgP1RkZLMlNxNTUwVGd0NXNhdmhaTUxNZ2xHTUdld2w4/view?usp=drivesdk

Equipment Manual

Google Drive Live Link
urlhttps://drive.google.com/file/d/13zPLdLRG0K31GggpzhI_VYoY3ukpFChz/view?usp=drivesdk

Source Inspection

Google Drive Live Link
urlhttps://drive.google.com/file/d/1n_Mh8RPALMqUfQd9yTR_nEZDducORPTj/view?usp=drivesdk

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/1AnCzKcfX8XYs97dhpESjX0fVewZL5N3h


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