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The nanoFAB offers a wide variety of material characterization capabilities. For many, data is often required for only a few infrequent samples. This can often mean training is impractical for both the user and staff. In these cases the nanoFAB offers sample analysis services. Along with equipment time for analysis, a staff processing fee is charged. For continuous analysis needs the nanoFAB can arrange for a contract for services for external groups. For external groups, who are interested in learning more about this capability, please contact Peng Li for more information. |
Sample Compatibility and Analysis for XPS, UPS, Auger, SIMS, SEM and HIM
Technique | XPS(Ultra)1 | XPS(PHI)1 | UPS1,2 | AES1 | SIMS1 | SEM | HIM/FIB |
Training | no | special3 | no | no | no | yes | yes |
Max size (LxWxH) (mm) for bulk sample | 12x12x4 10x5x10 | 15x15x8 15x6x13 | 12x12x4 | 12x12x4 | 20x20x3 20x10x6 | No special4 | 10x10x4 |
Min size (LxWxH) (mm) for bulk sample | 4x4x0.2 | 2x2x0.2 | 10x10x0.2 | 2x2x0.2 | 2x2x0.1 | No special4 | No special4 |
Volume for powder sample (mm3) | > 5 | > 5 | > 5 | > 5 | > 5 | > 5 | > 5 |
Composition | yes | yes | no | yes | yes | yes | no |
Depth profile or surface cleaning | no | yes | no | yes | yes | no | no |
Magnetic5 | Sensitive | Sensitive | Sensitive | Sensitive | Sensitive | Sensitive6 | Sensitive |
Conductive | yes | yes | yes | yes | yes | yes | yes |
Insulator | yes | yes | no | no | yes | yes, need coating or LV mode7 | yes8 |
Dry | yes | yes | yes | yes | yes | yes | yes |
Liquid | no | no | no | no | no | no | no |
Pressure compatible (Torr) | 10-9 | 10-9 | 10-9 | 10-9 | 10-9 | 10-6 | 10-7 |
- These tools are sensitive to the sample surface. Make sure the samples are not flipping inside the container during transfer and indicate the interested surface.
- Sample surface has to be uniform in terms of conductivity and coverage.
- PHI XPS training is selective to the special users for the depth profile experiment.
- Talk to nanofab staff for detailed information.
- Data quality from magnetic samples might not be satisfied.
- Sigma FE-SEM is the best choice for magnetic materials.
- Low vacuum mode is only in Tescan and EVO 10.
- Need Au coating ~50 nm for FIB. No Au coating for HIM.
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