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The nanoFAB offers a wide variety of material characterization capabilities. For many, data is often required for only a few infrequent samples. This can often mean training is impractical for both the user and staff. In these cases the nanoFAB offers sample analysis services. Along with equipment time for analysis, a staff processing fee is charged. For continuous analysis needs the nanoFAB can arrange for a contract for services for external groups.

For external groups, who are interested in learning more about this capability, please contact Peng Li for more information.


Sample Compatibility and Analysis for XPS, UPS, Auger, SIMS, SEM and HIM 

Technique

XPS(Ultra)1

XPS(PHI)1

UPS1,2

AES1

SIMS1

SEM

HIM/FIB

Training

no

special3

no

no

no

yes

yes

Max size (LxWxH) (mm) for bulk sample

12x12x4

10x5x10

15x15x8

15x6x13

12x12x4

12x12x4

20x20x3

20x10x6 

Sigma SEM max height 17.5, EDX max height 13.5 mm.

EVO 10 SEM max height 30, EDX max height 26 25 mm.

No special for size4

10x10x4

Min size (LxWxH) (mm) for bulk sample

4x4x0.2

2x2x0.2

10x10x0.2

2x2x0.2

2x2x0.1

No special4

No special4

Volume for powder sample (mm3)

> 5

> 5

> 5

> 5

> 5

> 5

> 5

Composition

yes

yes

no

yes

yes

yes

no

Depth profile or surface cleaning

no

yes

no

yes

yes

no

no

Magnetic5

Sensitive

Sensitive

Sensitive

Sensitive

Sensitive

Sensitive6

Sensitive

Conductive

yes

yes

yes

yes

yes

yes

yes

Insulator

yes

yes

no

no

yes

yes, need coating or LV mode7

yes8

Dry

yes

yes

yes

yes

yes

yes

yes

Liquid

no

no

no

no

no

no

no

Pressure compatible (Torr)

10-9

10-9

10-9

10-9

10-9

10-6

10-7

  1. These tools are sensitive to the sample surface. Make sure the samples are not flipping inside the container during transfer and indicate the interested surface.
  2. Sample surface has to be uniform in terms of conductivity and coverage.
  3. PHI XPS training is selective to the special users for the depth profile experiment.
  4. TSigma FESEM max height 13,5alk to nanofab staff for detailed information.
  5. Data quality from magnetic samples might not be satisfied.
  6. Sigma FE-SEM is the best choice for magnetic materials.
  7. Low vacuum mode is only in Tescan and EVO 10.
  8. Need Au coating ~50 nm for FIB. No Au coating for HIM.














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