| Info |
|---|
The nanoFAB offers a wide variety of material characterization capabilities. For many, data is often required for only a few infrequent samples. This can often mean training is impractical for both the user and staff. In these cases the nanoFAB offers sample analysis services. Along with equipment time for analysis, a staff processing fee is charged. For continuous analysis needs the nanoFAB can arrange for a contract for services for external groups. For external groups, who are interested in learning more about this capability, please contact Peng Li for more information. |
Step-by-step guide
| Note |
|---|
All sample analysis requests must be submitted through LMACS. Samples are dropped off and picked up outside of ECERF W1-040. |
- Login to LMACS
- Create a new request.
- Select Sample as the type.
- Enter as much information as necessary in the Summary field.
- If you would like your samples returned to you, check Return any samples. If left unchecked, your samples will be discarded.
- Click Create Request
- Once the request is successfully created, click Edit Request to add details about your samples.
- Expand the Add Item(s) section. You will add one item per sample.
- Enter the sample name in the Label field
- Select Sample for the type
- Add any additional information and analysis details in the Description field
- Click Add Item
- Repeat step 4 for any additional samples
- Print your request after adding all the items and details.
- Click the print icon
located below your name in the upper right corner of the request. - Check Item Details
- Click Print Request
- A PDF file will be generated. You will submit this with your physical sample.
- Click the print icon
- Print a copy of your request, attach it to your samples and submit them to the nanoFAB Characterization Labs:
- CME L1-113 (Lower Level 1): XPS, Auger and SIMS samples
- ECERF W1-040: other analysis
- Comments and results will be communicated through the Comments and Files sections of the request in LMACS.
- Results will be uploaded to Files
- Communication should be done through the Comments
- If you asked for your samples to be returned, they will be available for pickup outside the Characterization labs in CME L1-113 or ECERF W1-040.
Sample Compatibility and Analysis for XPS, UPS, Auger, SIMS, SEM and HIM
Technique | XPS(Ultra)1 | XPS(PHI)1 | UPS1,2 | AES1 | SIMS1 | SEM | HIM/FIB |
Training | no | special3 | no | no | no | yes | yes |
Max size (LxWxH) (mm) for bulk sample | 12x12x4 10x5x10 | 15x15x8 15x6x13 | 12x12x4 | 12x12x4 | 20x20x3 20x10x6 | Sigma SEM max height 17.5, EDX max height 13.5 mm. EVO 10 SEM max height 30, EDX max height 25 mm. No special for size4 | 10x10x4 |
Min size (LxWxH) (mm) for bulk sample | 4x4x0.2 | 2x2x0.2 | 10x10x0.2 | 2x2x0.2 | 2x2x0.1 | No special4 | No special4 |
Volume for powder sample (mm3) | > 5 | > 5 | > 5 | > 5 | > 5 | > 5 | > 5 |
Composition | yes | yes | no | yes | yes | yes | no |
Depth profile or surface cleaning | no | yes | no | yes | yes | no | no |
Magnetic5 | Sensitive | Sensitive | Sensitive | Sensitive | Sensitive | Sensitive6 | Sensitive |
Conductive | yes | yes | yes | yes | yes | yes | yes |
Insulator | yes | yes | no | no | yes | yes, need coating or LV mode7 | yes8 |
Dry | yes | yes | yes | yes | yes | yes | yes |
Liquid | no | no | no | no | no | no | no |
Pressure compatible (Torr) | 10-9 | 10-9 | 10-9 | 10-9 | 10-9 | 10-6 | 10-7 |
- These tools are sensitive to the sample surface. Make sure the samples are not flipping inside the container during transfer and indicate the interested surface.
- Sample surface has to be uniform in terms of conductivity and coverage.
- PHI XPS training is selective to the special users for the depth profile experiment.
- TSigma FESEM max height 13,5alk to nanofab staff for detailed information.
- Data quality from magnetic samples might not be satisfied.
- Sigma FE-SEM is the best choice for magnetic materials.
- Low vacuum mode is only in Tescan and EVO 10.
- Need Au coating ~50 nm for FIB. No Au coating for HIM
| Info |
|---|
Data processing and software training
|
- .
Related articles
| Content by Label | ||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
| Page properties | ||
|---|---|---|
| ||
|