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The Variable Angle Spectroscopic Ellipsometer is capable of high accuracy measurement of various optical properties of your thin filmsthin film materials. It is primarily used to measure the film thickness and/or optical constants from a thin film. Analysis is simplest for single-layer films deposited on a Si substrate, although analysis of multilayer specimens is also reasonably straightforward. |
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Contacts
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System Features
Table to highlight system features these can be displayed in the format that makes the most sense for the tool. The table below is an example using an ICP-RIE- 300–1700 nm spectral range
- Reflection and transmission ellipsometry
- Reflectance (R) intensity
- Transmission (T) intensity
- Depolarization, scatterometry, Mueller-matrix
- RAE + autoretarder equipped
Documents
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| Hazard Assessment |
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Staff Documents
Drive Folder
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Related Documents
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