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The AccuThermo AW610 was derived from the AG Associates 610 production-proven design. Allwin21 Corp. is the exclusive manufacturer of the AG Associates Heatpulse 610 desktop atmospheric RTP (Rapid Thermal Processing) system. The system uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1-600 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing. |
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Contacts
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System Features
| Wafer Handling | Small pieces, 2", 3", 4", 5", 6" wafer capability |
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| Process Gases | (3%-5%) H2:N2, N2, Ar |
| Temperature Range | 150°C - 1150°C |
| Ramp Up Rate | Programmable, 10°C to 120°C per second. |
| Ramp Down Rate | Non-programmable, 10°C to 200°C (sample and chamber conditions dependent) |
| Steady State Duration | 0-600 seconds per step (temperature dependent) |
| Temperature Repeatability | ±0.5°C or better at 1150°C wafer-to-wafer. |
| Temperature Uniformity | ±5°C across a 6" (150 mm) wafer at 1150°C. |
Documents
| Operating Procedure | |
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| Hazard Assessment | Allwin AW610 RTA HA |
| Recipe Editing | AW610 RTA - Recipe editing procedure |
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