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The Filmetrics F50-UV is a thin-film metrology tool which measures film thickness via specular reflectancespectroscopic reflectometry, with an automated stage to enable efficient collection of thickness uniformity maps. |
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Contacts
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System Features
| • | Substrate size: ~5 mm × 5 mm to 200 mm diameter |
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| • | Thickness measurement range: 5 nm – 40 µm |
| • | Min. thickness to measure n and k: 50 nm |
| • | Wavelength range: 190–1100 nm |
| • | Spot size: 1.5 mm |
| • | Light source: deuterium + tungsten-halogen (dual light source: may choose one or both lamps) |
| • | Measurement results visualisation in 2D and 3D |
Documents
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| Hazard Assessment |
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Staff Documents
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Related Documents
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