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A four-pocket manual electron-beam evaporation system for deposition of dielectric and metal thin films. One of the pockets, labelled "Au", has been designated for gold deposition only. Please have staff refill aluminum and gold pellets. |
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Contacts
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System Features
| Four-pocket e-beam hearth | |
| Materials: metals, oxides | |
| Gas species: Ar, O2 | |
| No substrate rotation |
Documents
| Operating Procedure | |
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| Hazard Assessment | Electron-Beam Evaporation System #1 (Gomez) HA |
| QCM Material Parameters |
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Staff Documents
Drive Folder
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Related Documents
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