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Page properties
idhazard-assessment


Equipment

Litho Wet Deck #1 - TMAH

Litho Wet Deck #2 - TMAH

Process AreaPhotoresist development - TMAH based developers
LocationECERF W1-062, Lithography
Assessed ByGustavo de Oliveira
Date of Assessment

 

Final Assessment

Hazard assessment label
HazardLabelHigh
  




Warning
titlePlease Review

Carefully review and familiarize yourself with the hazard assessment applicable to your tool or process.


Embedded Google Drive File
urlhttps://drive.google.com/a/ualberta.ca/file/d/108a87Aia3bpZ0skFkCckHOMXPBPDd4Lm/view?usp=drivesdk
height600