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titleOverview

The SUSS Bonder is available to users who require anodic, silicon fusion, eutectic, or thermo-compressive bonding.



Page properties
idequipment-properties


LMACS NameSuss Bonder
Confluence Labelsuss-cb6l-bonder
Process Area

Equipment process area
EquipmentAreaPlasma Etch

ModelCB6L
VendorSuss MicroTec
Team




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groupnf-staff


Serial Number150
UofA Asset Tag Number500020
Service Contract

Status
colourRed
titleNO





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Contacts


NameCompanyEmailPhone
Technical ContactTechSupportNASuss MicroTectechsupportNA@suss.com+1-951-817-3700

Lance MistlerSuss MicroTeclmistler@suss.com
Sales ContactLee BerlemannSuss MicroTeclee.berlemann@suss.com

(c) +1 408 431 4442

(p)  +1 951 817 3705

Director of ServiceRick BabasickSuss MicroTecRichard.Babasick@suss.com



System Features

Wafer Handlingpieces100 mm150 mm
Process Temperature500 degC max.
Process Pressure 750 Torr max.~5.0e-4 Torr min.
Process Force8kN max.

Process Voltage2000V max.

Process Current15mA max.

Process GasN2 only


Documents

Operating Procedure

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/1K4MM7EXo26CktSOLiGbOZf1LnUbBtp2m/view?usp=drivesdk

Bonding Information

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/0B3udzqAZKsfiNU5lemFwMjZPWGs/view?usp=drivesdk

Hazard AssessmentSuss CB6L Bonder Hazard Assessment - HA


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groupnf-staff

Staff Documents


Operator Manual

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/1duBozJ7zGYLVmjLPDlzfetYgny02N8RD/view?usp=drivesdk

Service Manual

Google Drive Live Link
urlhttps://drive.google.com/file/d/1-Rv-H-qhqluS-3eErWXS2AmZe9Ic16u3/view?usp=drivesdk

Pressure Head Assembly Schematic

Google Drive Live Link
urlhttps://drive.google.com/file/d/1kcLApo55a0JFhqBWkPNLMsL6YiIEIQDS/view?usp=drivesdk

SUSS - CDA N2 and Vacuum Schematic

Google Drive Live Link
urlhttps://drive.google.com/file/d/1zv7VjzxXD0TCAISTBB2sX2UGuanvWGvc/view?usp=drivesdk

nanoFAB - CDA N2 and Vacuum Schematic

Google Drive Live Link
urlhttps://drive.google.com/file/d/1-DqZ2LmaxcZdlDm5o2UbLLNGY-TuGCaM/view?usp=drivesdk

Drive Folder

Embedded Google Drive Folder
sortname
urlhttps://drive.google.com/drive/folders/1lSUCV-hQxHUxb_1-sfbiAmDZJjG4hY0U


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