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changes.mady.by.user Glenn Elaschuk

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titleOverview

An atmospheric-pressure quartz tube furnace for general annealing and glass bonding. No metals are allowed in this furnace; metal-containing wafers can be annealed in the Muffle Furnace or Tystar Doped Anneal tool.



Page properties
idequipment-properties


LMACS NameTystar General Anneal (tube 6)
Process Area

Equipment process area
EquipmentArea DepositionAncillary

ModelTystar Mini Series
VendorTystar
Team

Aditi Ganji Aaron Hryciw Michael Hume Glenn Elaschuk  




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Serial Number4201062LS
UofA Asset Tag Number454969
Service Contract

   

Status
colourRed
titleNO





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Contacts


NameCompanyEmailPhone
Technical ContactHenry HeidbrederTystarhenryh@tystar.com310-781-9219 ext 213

Jim SmithTystarjsmith@tystar.com310-781-9219 ext 219
Sales ContactLong HoangTystarlong@tystar.com310-781-9219 ext 223



Process Gases

Process GasesMax Flow (MFC Range)
N2

10000 sccm

Temperature Range

ZoneMinMax
1500 C1100 C
2500 C1100 C
3500 C1100 C

System Features

Temperature



Duration




Documents

Operating Procedure

Tystar SOP

Hazard Assessment


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Staff Documents


Tystar DocumentationTystar Furnaces
Service ManualTystar Furnaces/Maintenance
Temperature Calibration

Google Drive Live Link
urlhttps://drive.google.com/file/d/1sYmxbIuHH-9xeEm1lQ7dYrkfzWolpxE0/view?usp=drivesdk

nanoFAB Quartz Inventory

Google Drive Live Link
urlhttps://docs.google.com/spreadsheets/d/1r5vVEKhspTF1aCWkd39_AU0hAcnUqH5kLjQzgpxlWfY/edit?usp=drivesdk

Drive Folder

Embedded Google Drive Folder
sortname
urlhttps://drive.google.com/drive/folders/17XwT1TU4YKcLiElgTKUWXIeNeUiwrtSk


Related Documents

Content by Label
cqllabel = "tube6" and label = "tystar"