X-ray photoelectron spectroscopy (XPS/ESCA) is the most widely used surface analysis technique and has many well established industrial and research applications. XPS provides quantitative elemental and chemical state information from surfaces and thin film structures. XPS is applied to a diverse range of materials applications including: polymers, metals, catalysts, thin films, photovoltaics, batteries, wear coatings, nanomaterials, semiconductor devices, magnetic storage media, display technology, and biomedical devices. The VersaProbe III is the next generation of PHI’s highly successful multi-technique XPS product line and provides a two to three-fold increase in sensitivity over the previous generation. Physical Electronics (PHI) is the leading supplier of surface analysis instrumentation and PHI XPS instruments are the only XPS instruments that are equipped with a micro-focused, raster scanned, x-ray beam that provides the unique capabilities associated with a scanning XPS microprobe while maintaining an uncompromised large area spectroscopy capability. |