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Note
iconfalse
titleOverview
The PlasmaPro 100 Estrelas platform is designed to give total flexibility for deep reactive-ion etching (DRIE) of Si, serving a diverse set of process requirements across the micro-electromechanical systems (MEMS), advanced packaging, and Nanotechnology markets. Developed with both the research and production markets in mind, the PlasmaPro 100 Estrelas offers the ultimate in process flexibility.



Page properties
idequipment-properties


LMACS NameICPRIE - Oxford Estrelas (DSE)

oxford-plasmapro-100-estrelas
Process Area

Equipment process area
EquipmentAreaPlasma Etch

ModelPlasmaPro 100 Estrelas
VendorOxford Instruments
Team

Michael Hume Devin Fortier Scott Munro Aaron Hryciw



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Serial Number220167
UofA Asset Tag Number605427
Service Contract

Status
colourRed
titleNO
 

Cryo Table CoolingRigaku LN60




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Contacts

Info

While there are many individuals within Oxford who we have contacted directly over the years, the names / numbers listed here are our official points of contact.



NameCompanyEmailPhone
Technical ContactCustomer SupportOIPTccc.oia@oxinst.com1-800-447-4717
Sales ContactDemetrius ChrysostomouOIPTdemetrius.chrysostomou@oxinst.com1-978-435-5734
Process SupportOIPT Plasma SupportOIPTptsupport@oxinst.com1-978-369-9933
E-store (Parts & Service)https://estore.oxinst.us/products/plasma-technology/




Equipment Configuration

Info
titleConfiguration Schedule

Please refer to the Oxford Estrelas ICPRIE tool page on LMACS for the 100 mm / 150 mm clamp change schedule.


System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP RF Power5 kW (2MHz)


Chuck RF Power300 W LF (380kHz)600 W RF (13.56Mz)

Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC


Documents

Operating Procedures and Hazard Assessments

Oxford Estrelas ICPRIE SOP & HA Listing

Process InformationProcessing on the Oxford Estrelas


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Staff Documents

Operator Manual

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/0B800HgP1RkZLMkIzZzQtS01xS0U/view?usp=drivesdk

Service Manual / Drawings

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/0B800HgP1RkZLNDhRMENpVDZxTzQ/view?usp=drivesdk

Installation Guide

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/0B800HgP1RkZLTUZoci1LempUZWM/view?usp=drivesdk

Configuration Details

Google Drive Live Link
urlhttps://drive.google.com/a/ualberta.ca/file/d/0B800HgP1RkZLdkZ3RWlMTUZacW8/view?usp=drivesdk

Hardware Setup

Google Drive Live Link
urlhttps://docs.google.com/spreadsheets/d/19qGeXhtiRvEkQ7NnUaxVdcwhtum9kZlucuBSjDEntJU/edit?usp=drivesdk

Process Qualification Data

Google Drive Live Link
urlhttps://docs.google.com/spreadsheets/d/1LYlcqGz_16TMdm95ZR9cpcdMjxr9zn-By5nZkJFcqZI/edit?usp=drivesdk

Drive Folder

Embedded Google Drive Folder
sort-modified
urlhttps://drive.google.com/drive/folders/0B21O-DK3y8f4OU0teFlTS2tIcHM



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