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Page properties
idsds


ProductDichlorosilane
ManufacturerPraxair
Composition

SiH2Cl2

SynonymsChlorosilane A-199, DCS
Typical UsesLPCVD, Nitride Growth
Hazards

Nfpa704
InstNum2
SpecHazOxidizer
HealthNum4
FlamNum4
 

Whmis picts
Flamtrue
Corrtrue
Toxtrue
Presstrue

StorageNot to be stored onsite.
DisposalOnly available for use in contained systems with appropriate abatement
CommentsThis is a gas mixture delivered under sub-atmospheric conditions
Status

 

Status
colourRed
titlerestricted use
 




Warning
titleCheck First

Please contact a nanoFAB staff member for uses not listed above.


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fullwidthtrue
height600