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nanoFAB Knowledge Base
Application & Process Information
LOR 5B / AZ 1512 Bilayer Procedure
Page History
Versions Compared
Old Version
4
changes.mady.by.user
Aaron Hryciw
Saved on
Nov 12, 2021
compared with
New Version
Current
changes.mady.by.user
Aaron Hryciw
Saved on
Nov 12, 2021
Previous Change: Difference between versions 3 and 4
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Page properties
id
SOP
Applicable Equipment
HMDS oven, spinner, hotplate, mask aligner, direct-write lithography system, litho wet deck
Synonyms
Lift-off
bilayerÂ
bilayer
Process Area
Lithography
Embedded Google Drive File
url
https://drive.google.com/a/ualberta.ca/file/d/1322p7oPW_upEwd_dRi9ZoC1HRRSe5g55/view?usp=drivesdk
height
600
Overview
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