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nanoFAB Knowledge Base
Application & Process Information
AZ P4620 photoresist baseline recipe
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3
changes.mady.by.user
Aaron Hryciw
Saved on
Sept 10, 2019
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Current
changes.mady.by.user
Aaron Hryciw
Saved on
Oct 06, 2020
Previous Change: Difference between versions 2 and 3
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id
SOP
Applicable Equipment
Spinner, hotplate, mask aligner
, maskless aligner
Synonyms
Process Area
Lithography
Photolithography
Embedded Google Drive File
url
https://drive.google.com/a/ualberta.ca/file/d/15ykxIiZ_1qNKIp_3IXQo4C2yjDeTpma9/view?usp=drivesdk
height
600
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