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Fourier-transform infrared spectroscopy (FTIR)[1] is a technique used to obtain an infrared spectrum of absorption or emission of a solid, liquid or gas. An FTIR spectrometer simultaneously collects high-resolution spectral data over a wide spectral range. |
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Contacts
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System Features
| Wafer Handling | pieces (mounted) | 100 mm | 150 mm | |
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| Gas Species | O2 | C4F8 | SF6 | Ar |
| ICP Power | 3 kW | |||
| RF Power | 300 W | |||
| Chuck | -150 ºC (min) | 80 ºC (max) | mechanical clamp | HBC |
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Staff Documents
Drive Folder
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Related Documents
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