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titleOverview

Fourier-transform infrared spectroscopy (FTIR)[1] is a technique used to obtain an infrared spectrum of absorption or emission of a solid, liquid or gas. An FTIR spectrometer simultaneously collects high-resolution spectral data over a wide spectral range.



Page properties
idequipment-properties


LMACS Name

FTIR (Nicolet 8700)

Confluence Label

thermo-8700-ftir

Process Area

Equipment process area
EquipmentAreaCharacterization

Model8700
VendorThermo Nicolet
Team




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groupnf-staff


Serial NumberAGC0500205 (spectrometer);  AHL1502214 (IR microscope)
UofA Asset Tag Number
Service Contract

   

Status
colourRed
titleNO

Purchase Info
Installation




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Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC



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Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
sortname
urlhttps://drive.google.com/drive/folders/13GvWe_iWN3cHrio1UV6Aw_9i87qozSUJ


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