Page History

Page properties

id	sds

Product

Antimony trisulfide precursor solution

Manufacturer

Components manufactured by Fisher Scientific; mixed in user's lab.

Composition

35.9 wt.% carbon disulfide, 30.3 wt.% ethanol, 28.1 wt.% n-butylamine, 5.7% antimony trioxide; liquid

Synonyms

Typical Uses

Spin-on material for Sb₂S₃ direct patterning

Hazards

Nfpa704

HealthNum	3
FlamNum	4

Whmis picts

Flam	true
Health	true
Corr	true
Tox	true
Excl	true

Hazcat

HazClass	Serious eye damage/eye irritation
HazCat	1

;

Hazcat

HazClass	Specific target organ toxicity – repeated exposure
HazCat	1

(liver, kidney, cardiovascular system);

Hazcat

HazClass	Skin corrosion/irritation
SubCat	A
HazCat	1

;

Hazcat

HazClass	Reproductive toxicity
HazCat	2

;

Hazcat

HazClass	Carcinogenicity
HazCat	2

;

Hazcat

HazClass	Flammable liquids
HazCat	2

;

Hazcat

HazClass	Acute toxicity
HazCat	3

(dermal);

Hazcat

HazClass	Acute toxicity
HazCat	3

(inhalation - dusts and mists);

Hazcat

HazClass	Specific target organ toxicity – single exposure
HazCat	3

(respiratory system);

Hazcat

HazClass	Specific target organ toxicity – single exposure
HazCat	3

(central nervous system);

Hazcat

HazClass	Acute toxicity
HazCat	4

(oral);

Hazcat

HazClass	Acute toxicity
HazCat	4

(inhalation - vapours)

Storage

Not stored at nanoFAB (kept in user's lab and brought to cleanroom for processing).

Disposal

Seal all waste (including foil liners, pipettes, cleanroom wipes, etc.) in a large Ziploc bag, and dispose of in red organic sharps waste pail in secondary litho area. Ziploc bags are provided in the cabinet at the end of the wet aisle table, opposite the resist fridges. All waste, including developer rinses, would need to be collected in a segregated waste bottle for disposal as hazardous waste.

Comments

All spin-coating and soft-baking must occur in Aisle 1 fumehood, with the sash kept as closed as possible. Must be spun on in foil-lined Headway spinner and fully soft-baked on a foil-lined hot plate in the fumehood. May be exposed in the Nanoscribe PPGT+ (oil immersion mode or 20× air objective only: no immersion (DiLL) mode allowed) or Heidelberg MLA150.

Status


colour	Red
title	restricted use

Show If

group	nf-staff

Import Request	Viraj Bhingardive, Behrad Gholipour group, 15 Nov 2022. [Request]

Warning

title	Check First

Please contact a nanoFAB staff member for uses not listed above.

Embedded Google Drive File

url	https://drive.google.com/file/d/11E-IziyaPExMLPLQmN7n6gH5aVuhuWpQ/view?usp=drivesdk
fullwidth	true
height	600

Embedded Google Drive File

url	https://drive.google.com/file/d/11FHfB1f66wsI_2GOUc8b0gLjHBKt67g-/view?usp=drivesdk
fullwidth	true
height	600

Embedded Google Drive File

url	https://drive.google.com/file/d/11FEsFxIpua-BvBX1S8OVMb2O8MPjaDDU/view?usp=drivesdk
fullwidth	true
height	600

Embedded Google Drive File

url	https://drive.google.com/file/d/11FETnPpFbmlO1Ddqfg3KCxq5k-rhK3Rc/view?usp=drivesdk
fullwidth	true
height	600

Additional information

Paper describing direct patterning of metal chalcogenides: Adv. Func. Mat., 30, 2002685 (2020)

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