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Achilles is an AXXIS deposition system: an electron-beam evaporator with computer-controlled substrate tilt (α) and rotation (φ), which enables the deposition of nanostructured thin films via the glancing angle deposition (GLAD) technique. |
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Contacts
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System Features
Four-pocket e-beam evaporation hearth | |
| Materials: metals, Si, C, oxides | |
| Dual-axis substrate motion: tilt (α) and azimuthal rotation (φ) | |
| Adjustable deposition pressure (variable position gate valve & MFCs) | |
| Base pressure: ~4e-8 Torr (20 hr pumpdown) |
Key Documents
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| Hazard Assessment | GLAD System (Achilles) - Hazard Assessment |
| QCM Material Parameters | QCM Material Parameters |
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Staff Documents
Drive Folder
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Related Documents
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