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changes.mady.by.user Gustavo de Oliveira Luiz

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changes.mady.by.user Michael Hume

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Page properties
idhazard-assessment


Equipment
Lithography wet decks #1 and

Litho Wet Deck #1

Litho Wet Deck #2

Process AreaPhotoresist development - TMAH based developers
LocationECERF W1-062, Lithography
Assessed ByGustavo de Oliveira
Date of Assessment

 

Final Assessment

Hazard assessment label
HazardLabelHigh
  




Warning
titlePlease Review

Carefully review and familiarize yourself with the hazard assessment applicable to your tool or process.


Embedded Google Drive File
urlhttps://drive.google.com/a/ualberta.ca/file/d/108a87Aia3bpZ0skFkCckHOMXPBPDd4Lm/view?usp=drivesdk
height600