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Note
iconfalse
titleOverview



Page properties
idequipment-properties


LMACS NameEllipsometer (M-2000V)
Process Area

Equipment process area
EquipmentAreaCharacterization

Model
VendorJ.A. Woollam
Team

Peng Li Shiau-Yin Wu 




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groupnf-staff


Serial Number
UofA Asset Tag Number
Service Contract

   

Status
colourRed
titleNO




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groupnf-staff

Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)100 mm150 mmGas SpeciesO2C4F8SF6ArICP Power3 kWRF Power300 WChuck-150 ºC (min)80 ºC (max)mechanical clampHBC

Key Documents

SOP
Hazard Assessment



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groupnf-staff

Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/13GvWe_iWN3cHrio1UV6Aw_9i87qozSUJ16ewpJ3x0ErnIVBhFreOzOc4kGWTjfFFB


Related Documents

Content by Label
cqllabel = "equipment"