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Project NameKJLC 150LX ALD Installation
Target Completion Date

 

Status

In Progress

LocationW1-062 (Cleanroom)
ImpactsMinibrute Furnaces, Inspection Microscopes, UV Ozone Bonder, PDMS Process Area, Trion Phantom RIE, Vacuum ovens, KJLC 150LX Atomic Layer Deposition,  Branson Barrel Etcher

Goals


  1. Install the KJLC 150LX Atomic Layer Deposition System
  2. Relocate the Trion RIE to make room for the KJLC 150LX Atomic Layer Deposition system
  3. Reconfigure the South-East corner of the cleanroom to improve space utilization
    1. Decomission Minibrute Furnaces
    2. Install additional cleanroom storage
    3. Remove PDMS processing from the cleanroom
    4. Relocate inspection micrscopes


Background and strategic fit


In order to accommodate the installation of the new KJLC 150LX ALD system, a number of changes must be made within the cleanroom to make adequate space for the tool. The nanoFAB will take advantage of this period to make a number of smaller changes to the space in the south-east corner of the cleanroom. These changes will mean the removal of some equipment, and the relocation of others. This project aims to improve the overall usability of this portion of the cleanroom.


Key Dates and Timelines


These dates are provided as a best estimate based on the project plan and timeline. All dates are subject to change as we continue to work in a fluid environment. 


TaskDateCommentsStatus
Move PDMS Setup

 

PDMS will be unavailable during this period. The setup will be relocated to W1-040. Uncured PDMS will no longer be allowed in the cleanroom. 1 Vacuum oven will remain in the cleanroom on top of the Branson

COMPLETE

Decommission MiniBrute Furnaces 

 

Furnaces will be unavailable after this date. 

COMPLETE

Move Inspection Microscopes

 

Microscopes will be relocated to the east wall of the cleanroom (see KJLC 150LX ALD Layout)

COMPLETE

Install additional cleanroom storage lockers

 

Add 18 additional storage units along the south cleanroom wall

COMPLETE

Relocate Trion RIE

 

The Trion RIE will be unavailable during this period. 

COMPLETE

ALD installation

 

The ALD installation process timeline will be dependent on the ability of the installation engineer to travel to Canada from the USA.

SHIPMENT DELAYED